Authors

Dilliway, G.; Pierreux, D.; Fischer, P.; Menou, Nicolas; Pawlak, Malgorzata; Wang, Xin Peng; Wouters, Dirk

Conference

8th International Conference on Atomic Layer Deposition - ALD

Title

Effect of deposition and anneal temperature on batch-ALD deposited ZrO2/Al2O3/ZrO2 films for DRAM MIM capacitor applications

Publication type

Proceedings paper

Embargo date

9999-12-31