Publication:
SLIM-Cut: a kerf-loss-free method for wafering 50-μm-thick crystalline Si wafers based on stress-induced lift-off
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1894 since deposited on 2021-10-17
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Acq. date: 2025-12-12
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1894 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2025-12-12
Citations