Application of HCl etch in the production of novel devices

Thumbnail
View/open
Metadata
Show full item record
Authors
Hikavyy, Andriy; Rooyackers, Rita; Verheyen, Peter; Vellianitis, Georgios; Van Dal, Mark; Lander, Rob; Loo, Roger; Caymax, Matty
Conference
213th ECS Meeting
Title
Application of HCl etch in the production of novel devices
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections