Authors

Lorenz, Anne; John, Joachim; Derluyn, Joff; Cheng, Kai; Das, Jo; Germain, Marianne; Borghs, Gustaaf

Conference

32nd Workshop on Compound Semiconductor Devices and Integrated Circuits - WOCSDICE

Title

The influence of fluoride based gate etch process on the current collapse of AlGaN/GaN HEMTs

Publication type

Meeting abstract

Embargo date

9999-12-31