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Enhancement of the metal si-doped AlGaAs Schottky barrier height by CH4/H2 reactive ion etching
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Authors
Pereira, Ricardo
;
Van Hove, Marleen
;
Van Rossum, Marc
Issue
1
Journal
Journal of Solid-State Devices and Circuits
Volume
4
Title
Enhancement of the metal si-doped AlGaAs Schottky barrier height by CH4/H2 reactive ion etching
Publication type
Journal article
Embargo date
9999-12-31
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