Authors

Marsik, Premysl; Verdonck, Patrick; Schneider, Dieter; De Roest, David; Kaneko, Shinya; Baklanov, Mikhaïl

ISSN

1610-1634

Issue

5

Journal

Physica Status Solidi C

Volume

5

Title

Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films

Publication type

Journal article

Embargo date

9999-12-31