Publication:
Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films
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1886 since deposited on 2021-10-17
4last month
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Acq. date: 2026-08-28
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Statistics
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1886 since deposited on 2021-10-17
4last month
1last week
Acq. date: 2026-08-28
Citations