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Conference contributions
Ni(Pt)Si thermal stability improvement by carbon implantation
Publication:
Ni(Pt)Si thermal stability improvement by carbon implantation
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mertens, Sofie
;
Hoffmann, Thomas Y.
;
Vrancken, Christa
;
Jakschik, Stefan
;
Richard, Olivier
;
Verleysen, Eveline
;
Bender, Hugo
;
Zhao, Chao
;
Vandervorst, Wilfried
;
Absil, Philippe
;
Lauwers, Anne
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1916
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations
Metrics
Views
1916
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations