Authors

Mertens, Sofie; Hoffmann, Thomas Y.; Vrancken, Christa; Jakschik, Stefan; Richard, Olivier; Verleysen, Eveline; Bender, Hugo; Zhao, Chao; Vandervorst, Wilfried; Absil, Philippe; Lauwers, Anne

Conference

Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS 4: New Materials, Processes, and Equipment

Title

Ni(Pt)Si thermal stability improvement by carbon implantation

Publication type

Proceedings paper