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Record Ion/Ioff performance for 65nm Ge pMOSFET and novel Si passivation scheme for improved EOT scalability
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Authors
Mitard, Jerome
;
De Jaeger, Brice
;
Leys, Frederik
;
Hellings, Geert
;
Martens, Koen
;
Eneman, Geert
;
Brunco, David
;
Loo, Roger
;
Shamiryan, Denis
;
Vandeweyer, Tom
;
Winderickx, Gillis
;
Vrancken, Evi
;
De Meyer, Kristin
;
Caymax, Matty
;
Pantisano, Luigi
;
Meuris, Marc
;
Heyns, Marc
Conference
Technical Digest International Electron Devices Meeting - IEDM
Title
Record Ion/Ioff performance for 65nm Ge pMOSFET and novel Si passivation scheme for improved EOT scalability
Publication type
Proceedings paper
Embargo date
9999-12-31
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