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Record Ion/Ioff performance for 65nm Ge pMOSFET and novel Si passivation scheme for improved EOT scalability

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1882 since deposited on 2021-10-17
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Acq. date: 2026-10-10

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1882 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-10-10

Citations