Atomic layer deposition of Hf-based materials in semiconductor applications

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Authors
Nyns, Laura; Delabie, Annelies; Heyns, Marc; Pourtois, Geoffrey; Van Elshocht, Sven; Vinckier, Chris; De Gendt, Stefan
Conference
214th ECS Meeting
Title
Atomic layer deposition of Hf-based materials in semiconductor applications
Publication type
Meeting abstract
Embargo date
9999-12-31
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