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Anomalous positive-bias temperature instability of high-k/metal gate devices with Dy2O3 capping
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Authors
O'Connor, Robert
;
Chang, Vincent
;
Pantisano, Luigi
;
Ragnarsson, Lars-Ake
;
Aoulaiche, Marc
;
O'Sullivan, Barry
;
Groeseneken, Guido
ISSN
0003-6951
Issue
5
Journal
Applied Physics Letters
Volume
93
Title
Anomalous positive-bias temperature instability of high-k/metal gate devices with Dy2O3 capping
Publication type
Journal article
Embargo date
9999-12-31
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