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Atomic layer deposition of HfO2 thin films on InxGa1-xAs
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Atomic layer deposition of HfO2 thin films on InxGa1-xAs
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
O'Mahony, A.
;
O'Connor, E.
;
Long, R.
;
Thomas, K.
;
Povey, I.M.
;
Hurley, P.K.
;
Pemble, M.E.
;
Brennan, B.
;
Hughes, G.
;
Brammertz, Guy
;
Afanas'ev, V.V.
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Views
2025
since deposited on 2021-10-17
5
last month
3
last week
Acq. date: 2026-01-12
Citations