Authors

Pawlak, Malgorzata; Menou, Nicolas; Wang, Xin Peng; Dilliway, G.; Pierreux, D.; Fischer, P.; Vos, Rita; Hoyer, R.; Kittl, Jorge; Wouters, Dirk; Biesemans, Serge

Conference

MRS Spring Meeting Symposium H: Materials Science of High-k Dielectric Stacks

Title

Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications

Publication type

Oral presentation