Photoresist coating and patterning for through-silicon via technology

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Authors
Pham, Nga; Sabuncuoglu Tezcan, Deniz; Ruythooren, Wouter; De Moor, Piet; Majeed, Bivragh; Baert, Kris; Swinnen, Bart
ISSN
0960-1317
Issue
12
Journal
Journal of Micromechanics and Microengineering
Volume
18
Title
Photoresist coating and patterning for through-silicon via technology
Publication type
Journal article
Embargo date
9999-12-31
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