Atomic layer deposition of hafnium titanates dielectric layers

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Authors
Popovici, Mihaela Ioana; Delabie, Annelies; Van Elshocht, Sven; Menou, Nicolas; Wang, Xin Peng; Wouters, Dirk; Kittl, Jorge; Swerts, Johan; Knaepen, W.; Detavernier, Christophe
Conference
8th International Conference on Atomic Layer Deposition - ALD
Title
Atomic layer deposition of hafnium titanates dielectric layers
Publication type
Proceedings paper
Embargo date
9999-12-31
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