Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Iodine enhanced focused ion beam etching of silicon for photonic device modification and prototyping
Publication:
Iodine enhanced focused ion beam etching of silicon for photonic device modification and prototyping
Copy permalink
Date
2008-06
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
17196.pdf
1.5 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schrauwen, Jonathan
;
Van Lysebettens, J.
;
Vanhoutte, M.
;
Van Thourhout, Dries
;
Baets, Roel
Journal
Abstract
Description
Metrics
Views
1946
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations
Metrics
Views
1946
since deposited on 2021-10-17
Acq. date: 2025-12-10
Citations