Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Iodine enhanced focused ion beam etching of silicon for photonic device modification and prototyping
Publication:
Iodine enhanced focused ion beam etching of silicon for photonic device modification and prototyping
Copy permalink
Date
2008
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
17196.pdf
1.5 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schrauwen, Jonathan
;
Van Lysebettens, J.
;
Vanhoutte, M.
;
Van Thourhout, Dries
;
Baets, Roel
Journal
Abstract
Description
Statistics
Views
1946
since deposited on 2021-10-17
Acq. date: 2026-07-18
Citations
Statistics
Views
1946
since deposited on 2021-10-17
Acq. date: 2026-07-18
Citations