Authors

Schrauwen, Jonathan; Van Lysebettens, J.; Vanhoutte, M.; Van Thourhout, Dries; Baets, Roel

Conference

1st International Workshop on FIB for Photonics (Colocated with the 14th European Conference on Integrated Optics (ECIO))

Title

Iodine enhanced focused ion beam etching of silicon for photonic device modification and prototyping

Publication type

Proceedings paper

Embargo date

9999-12-31