Authors

Schrauwen, Jonathan; Van Thourhout, Dries; Baets, Roel; Klein, E.; Ay, F.; Hopman, W.; De Ridder, R.

Conference

52nd International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication - EIPBN

Title

Reducing optical losses in focused-ion-beam etched silicon

Publication type

Oral presentation

Embargo date

9999-12-31