Etch rates of Ge, GaAs and InGaAs in acids, bases and peroxide based mixtures

No Thumbnail [100%x80]
View/open
Metadata
Show full item record
Authors
Sioncke, Sonja; Brunco, David; Meuris, Marc; Uwamahoro, Olivier; Van Steenbergen, Jan; Vrancken, Evi; Heyns, Marc
Conference
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices
Title
Etch rates of Ge, GaAs and InGaAs in acids, bases and peroxide based mixtures
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections