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Low temperature Si, SiGe, and Ge growth and atomic layer doping with B, P, and As on Si(001) by chemical vapor deposition
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1841 since deposited on 2021-10-17
2last month
Acq. date: 2026-04-05
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Statistics
Views
1841 since deposited on 2021-10-17
2last month
Acq. date: 2026-04-05
Citations