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Low temperature Si, SiGe, and Ge growth and atomic layer doping with B, P, and As on Si(001) by chemical vapor deposition
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1839 since deposited on 2021-10-17
Acq. date: 2026-02-26
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Statistics
Views
1839 since deposited on 2021-10-17
Acq. date: 2026-02-26
Citations