Publication:
Impact of process optimizations on the electrical performance of high-k layers deposited by aqueous chemical solution deposition
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1761 since deposited on 2021-10-17
1last month
Acq. date: 2026-06-06
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Statistics
Views
1761 since deposited on 2021-10-17
1last month
Acq. date: 2026-06-06
Citations