A novel method for characterizing resist performance

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Authors

Van Steenwinckel, David; Gronheid, Roel; Van Roey, Frieda; Willems, Patrick; Lammers, Jeroen H.

Issue

2

Journal

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volume

7

Title

A novel method for characterizing resist performance

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles