On the characterisation of grown-in defects in Czocharski-grown Si and Ge

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Authors

Vanhellemont, Jan; Van Steenbergen, Jan; Holsteyns, Frank; Roussel, Philippe; Meuris, Marc; Mlynarczyk, K.; Spiewak, P.; Geens, Wim; Romandic, I.

ISSN

0957-4522

Issue

Suppl.1

Journal

Journal of Materials Science: Materials in Electronics

Volume

19

Title

On the characterisation of grown-in defects in Czocharski-grown Si and Ge

Publication type

Journal article

Embargo date

9999-12-31

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