Authors

Veloso, Anabela; Witters, Liesbeth; Demand, Marc; Ferain, Isabelle; Son, Nak-Jim; Kaczer, Ben; Roussel, Philippe; Simoen, Eddy; Kauerauf, Thomas; Adelmann, Christoph; Brus, Stephan; Richard, Olivier; Bender, Hugo; Conard, Thierry; Vos, Rita; Rooyackers, Rita; Van Elshocht, Sven; Collaert, Nadine; De Meyer, Kristin; Biesemans, Serge; Jurczak, Gosia

Conference

Symposium on VLSI Technology Digest of Technical Papers

Title

Flexible and robust capping-metal gate integration technology enabling multiple-VT CMOS in MuGFETs

Publication type

Proceedings paper

Embargo date

9999-12-31