Publication:

Multiple-Vt FinFET devices through La2O3 dielectric capping

Date

2008

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Witters, Liesbeth

;

Veloso, Anabela

;

Ferain, Isabelle

;

;

Collaert, Nadine

;

;

Adelmann, Christoph

;

Meersschaut, Johan

;

;

;

;

;

Kubicek, Stefan

;

De Meyer, Kristin

;

Biesemans, Serge

;

Metrics

1988 since deposited on 2021-10-17

1last month

Acq. date: 2025-12-10