Authors

Yang, Yu; Bender, Hugo; Arstila, Kai; Swinnen, Bart; Verlinden, Bert; De Wolf, Ingrid

ISSN

0026-2714

Issue

8_9

Journal

Microelectronics Reliability

Volume

48

Title

Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structures

Publication type

Journal article