Atomic layer deposition of GdHfOx thin films

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Authors
Adelmann, Christoph; Pierreux, Dieter; Swerts, Johan; Rosseel, Erik; Shi, Xiaoping; Tielens, Hilde; Kesters, Jurgen; Van Elshocht, Sven; Kittl, Jorge
Conference
Atomic Layer Deposition Applications 5
Title
Atomic layer deposition of GdHfOx thin films
Publication type
Proceedings paper
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