Publication:

Atomic layer deposition of GdHfOx thin films

Date

2009

Proceedings Paper

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Author(s)

Adelmann, Christoph

;

Pierreux, Dieter

;

;

;

;

;

Kesters, Jurgen

;

Van Elshocht, Sven

;

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2015 since deposited on 2021-10-17

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Acq. date: 2026-04-06