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Influence of the strain-relaxation induced defect creation on the lekage current of embedded Si1-xGex source/drain junctions

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1972 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-26

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1972 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-26

Citations