Authors

Bargallo Gonzalez, Mireia; Simoen, Eddy; Vissouvanadin Soubaretty, Bertrand; Eneman, Geert; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, Pierre; Thomas, Shawn

ISSN

1610-1634

Issue

8

Journal

Physica Status Solidi C

Volume

6

Title

Influence of the strain-relaxation induced defect creation on the lekage current of embedded Si1-xGex source/drain junctions

Publication type

Journal article