Publication:
Use of MIR-FTIR and k-value measurements to assess potential solutions to reduce damage during porous low-k integration
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1983 since deposited on 2021-10-17
3last month
Acq. date: 2026-03-17
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Statistics
Views
1983 since deposited on 2021-10-17
3last month
Acq. date: 2026-03-17
Citations