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Use of MIR-FTIR and k-value measurements to assess potential solutions to reduce damage during porous low-k integration
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Authors
Beynet, Julien
;
De Roest, David
;
Rochat, N.
;
Kellens, Kristof
;
Verdonck, Patrick
;
Sprey, Hessel
Conference
International Semiconductor Technology Conference - ISTC/CSTIC
Title
Use of MIR-FTIR and k-value measurements to assess potential solutions to reduce damage during porous low-k integration
Publication type
Proceedings paper
Embargo date
9999-12-31
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