Authors

Braginsky, O.V.; Kovalev, A.S.; Lopaev, D.V.; Malykhin, E.M.; Mankelevich, Y.A.; Rakhimova, T.V.; Rakhimov, A.T.; Vasilieva, A.N.; Zyryanov, S.M.; Baklanov, Mikhaïl

Conference

Advanced Metallization Conference 2008 (AMC 2008)

Title

Recombination probabilities of O and H atoms on the surface of nanoporous low dielectric constant SiCOH films

Publication type

Proceedings paper

Embargo date

9999-12-31