Publication:

Recombination probabilities of O and H atoms on the surface of nanoporous low dielectric constant SiCOH films

Date

2009

Proceedings Paper

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Files

18551.pdf 1.6 MB

Author(s)

Braginsky, O.V.

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Mankelevich, Y.A.

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Rakhimova, T.V.

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Vasilieva, A.N.

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;

Baklanov, Mikhaïl

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