Authors

Caymax, Matty; Leys, Frederik; Mitard, Jerome; Martens, Koen; Yang, Lijun; Pourtois, Geoffrey; Vandervorst, Wilfried; Meuris, Marc; Loo, Roger

ISSN

0013-4651

Issue

12

Journal

Journal of the Electrochemical Society

Volume

156

Title

The influence of the epitaxial growth process parameters on layer characteristics and device performance in Si-passivated Ge pMOSFETs

Publication type

Journal article