Publication:

Compensation of overlay errors due to mask bending and non-flatness for EUV masks

Date

2009

Proceedings Paper

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Files

17928.pdf 463.49 KB

Author(s)

Chandhok, Manish

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Leeson, Michael

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Martinez, Fabian

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Hendrickx, Eric

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Govindjee, Sanjay

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Brandstetter, Gerd

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Statistics

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Acq. date: 2026-04-06