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Compensation of overlay errors due to mask bending and non-flatness for EUV masks
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Authors
Chandhok, Manish
;
Goyal, Sanjay
;
Carson, Steve
;
Park, Seh-Jin
;
Zhang, Guojing
;
Myers, Alan
;
Leeson, Michael
;
Kamna, Marilyn
;
Martinez, Fabian
;
Stivers, Alan
;
Lorusso, Gian
;
Hermans, Jan
;
Hendrickx, Eric
;
Govindjee, Sanjay
;
Brandstetter, Gerd
;
Laursen, Tod
Conference
Alternative Lithographic Technologies
Title
Compensation of overlay errors due to mask bending and non-flatness for EUV masks
Publication type
Proceedings paper
Embargo date
9999-12-31
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