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NiO resistive switching material integrated at the bottom of via holes from localized oxidation of nickel metallic layer
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Authors
Courtade, Lorene
;
Muller, Ch.
;
Turquat, Ch.
;
Lisoni, Judit
;
Goux, Ludovic
;
Deleruyelle, D.
;
Wouters, Dirk
Conference
18th Workshop Materials for Advanced Metallization - MAM
Title
NiO resistive switching material integrated at the bottom of via holes from localized oxidation of nickel metallic layer
Publication type
Oral presentation
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