Publication:

New methods and instrumentation for functional, yield and reliability testing of MEMS on device, chip and wafer level

Date

2009
Proceedings Paper
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Author(s)

De Wolf, Ingrid  
;
De Coster, Jeroen  
;
Cherman, Vladimir  
;
Czarnecki, Piotr  
;
Kalicinski, Stanislaw
;
Varela Pedreira, Olalla  
;
Sangameswaran, Sandeep
;
Vanstreels, Kris  

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