Authors

Delabie, Annelies; Alian, AliReza; Bellenger, Florence; Caymax, Matty; Conard, Thierry; Franquet, Alexis; Sioncke, Sonja; Van Elshocht, Sven; Heyns, Marc; Meuris, Marc

ISSN

0013-4651

Issue

10

Journal

Journal of the Electrochemical Society

Volume

156

Title

H2O- and O3-based atomic layer deposition of high-K dielectric films on GeO2 passivation layers

Publication type

Journal article