Authors

Delabie, Annelies; Nyns, Laura; Alian, AliReza; Bellenger, Florence; Conard, Thierry; Franquet, Alexis; Sioncke, Sonja; Van Elshocht, Sven; Heyns, Marc; Meuris, Marc; Caymax, Matty

Conference

9th International Conference on Atomic Layer Deposition - ALD

Title

H2O and O3 based atomic layer deposition of high-k dielectric layers on high mobility substrates

Publication type

Proceedings paper