Publication:

Challenges building a 22nm node 6T-SRAM cell using immersion lithography

Date

2009

Proceedings Paper

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Files

18884.pdf 2.16 MB

Author(s)

Ercken, Monique

;

Altamirano Sanchez, Efrain

;

Baerts, Christina

;

;

De Backer, Johan

;

;

Delvaux, Christie

;

Horiguchi, Naoto

;

Locorotondo, Sabrina

;

Vandeweyer, Tom

;

Veloso, Anabela

;

Verhaegen, Staf

Metrics

2010 since deposited on 2021-10-17

Acq. date: 2026-01-09