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Wafer and simulations study comparing 5 LELE decomposition algorithms for both compliant and non-compliant lay-outs
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Wafer and simulations study comparing 5 LELE decomposition algorithms for both compliant and non-compliant lay-outs
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Date
2009
Proceedings Paper
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19659.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Fenger, Germain
;
La Cour, Pat
;
Tritchkov, Alex
;
Komirenko, Sergiy
;
Wiaux, Vincent
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Abstract
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2012
since deposited on 2021-10-17
Acq. date: 2025-12-12
Citations
Metrics
Views
2012
since deposited on 2021-10-17
Acq. date: 2025-12-12
Citations