Improvement in NBTI reliability of Si-passivated Ge/high-k/metal-gate pFETs

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Authors

Kaczer, Ben; Franco, Jacopo; Mitard, Jerome; Roussel, Philippe; Veloso, Anabela; Groeseneken, Guido

ISSN

0167-9317

Issue

7_9

Journal

Microelectronic Engineering

Volume

86

Title

Improvement in NBTI reliability of Si-passivated Ge/high-k/metal-gate pFETs

Publication type

Journal article

Embargo date

9999-12-31

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