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Fabrication of virtual Ge and Ge-rich SiGe substrates using selective or non-selective epitaxial growth
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Fabrication of virtual Ge and Ge-rich SiGe substrates using selective or non-selective epitaxial growth
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Wang, Gang
;
Souriau, Laurent
;
Hikavyy, Andriy
;
Takeuchi, Shotaro
;
Caymax, Matty
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1984
since deposited on 2021-10-18
Acq. date: 2025-12-11
Citations
Metrics
Views
1984
since deposited on 2021-10-18
Acq. date: 2025-12-11
Citations