Publication:
Fabrication of virtual Ge and Ge-rich SiGe substrates using selective or non-selective epitaxial growth
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1993 since deposited on 2021-10-18
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Acq. date: 2026-04-08
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1993 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-04-08
Citations