Authors

Luhn, Ole; Radisic, Alex; Vereecken, Philippe; Van Hoof, Chris; Ruythooren, Wouter; Celis, Jean-Pierre

Conference

215th Electrochemical Society Spring Meeting

Title

Characteristics of copper electrodeposits on featureless substrates and in microvias with aspect ratio up to 10

Publication type

Meeting abstract

Embargo date

9999-12-31