Impact of Epi-Si growth temperature on Ge-pFET performance

Thumbnail
Metadata
Show full item record
Authors
Mitard, Jerome; Martens, Koen; De Jaeger, Brice; Franco, Jacopo; Shea, Chris; Plourde, Chelsea; Leys, Frederik; Loo, Roger; Hellings, Geert; Eneman, Geert; Wang, Wei-E; Lin, Vic; Kaczer, Ben; De Meyer, Kristin; Hoffmann, Thomas Y.; De Gendt, Stefan; Caymax, Matty; Meuris, Marc; Heyns, Marc
Conference
39th European Solid-State Device Research Conference - ESSDERC
Title
Impact of Epi-Si growth temperature on Ge-pFET performance
Publication type
Proceedings paper
Collections