Authors

Nguyen, Duy; Rosseel, Erik; Takeuchi, Shotaro; Everaert, Jean-Luc; Yang, Lijun; Goossens, Jozefien; Moussa, Alain; Clarysse, Trudo; Loo, Roger; Lin, Vic; Vandervorst, Wilfried; Caymax, Matty

Conference

Abstracts 6th International Conference on Silicon Epitaxy and Heterostructures - ICSI-6

Title

Use of p- and n-type vapor phase doping and sub-melt laser anneal for extension junctions in sub-32 nm CMOS technology

Publication type

Meeting abstract

Embargo date

9999-12-31