Extreme scaled gate dielectrics by using ALD Hf-based composite materials

Thumbnail
View/open
Metadata
Show full item record
Authors
Pierreux, Dieter; Machkaoutsan, Vladimir; Tois, E.; Swerts, Johan; Schram, Tom; Adelmann, Christoph; Van Elshocht, Sven; Tseng, Joshua; Ragnarsson, Lars-Ake; Maes, Jan
Conference
216th ECS Meeting
Title
Extreme scaled gate dielectrics by using ALD Hf-based composite materials
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections