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Articles
Influence of the substrate doping level on spreading resistance profiling
Publication:
Influence of the substrate doping level on spreading resistance profiling
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Date
1996
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Clarysse, Trudo
;
Smith, H. E.
Journal
Journal of Vacuum Science and Technology B
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1864
since deposited on 2021-09-29
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Acq. date: 2026-01-08
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Metrics
Views
1864
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-08
Citations