New properties of halogen plasma-treated Cu films

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Authors

Pikulev, V.; Dictus, Dries; Loginova, S.; Baklanov, Mikhaïl

ISSN

1862-5282

Issue

6

Journal

International Journal of Materials Research

Volume

100

Title

New properties of halogen plasma-treated Cu films

Publication type

Journal article

Embargo date

9999-12-31

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