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Feasability of TiSi2 and CoSi2 for sub quarter micron processes
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Authors
Vanhaelemeersch, Serge
;
Baklanov, Mikhaïl
;
Maex, Karen
Conference
International Conference on Advanced Metallization and Interconnect Systems for ULSI Applications
Title
Feasability of TiSi2 and CoSi2 for sub quarter micron processes
Publication type
Oral presentation
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