Metrology for implanted Si substrate and dopant loss studies

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Authors
Radisic, Dunja; Shamiryan, Denis; Mannaert, Geert; Boullart, Werner; Rosseel, Erik; Bogdanowicz, Janusz; Goossens, Jozefien; Marrant, Koen; Bender, Hugo; Sonnemans, Roger; Berry, Ivan
Conference
Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11
Title
Metrology for implanted Si substrate and dopant loss studies
Publication type
Proceedings paper
Embargo date
9999-12-31
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