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Progressive degradation of TiN/SiON and TiN'/HfO2 gate stack triple gate SOI nFinFETs subjected to electrical stress
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Authors
Rafi, J.M.
;
Simoen, Eddy
;
Mercha, Abdelkarim
;
Collaert, Nadine
;
Campabadal, F.
;
Claeys, Cor
ISSN
1071-1023
Issue
1
Journal
Journal of Vacuum Science and Technology B
Volume
27
Title
Progressive degradation of TiN/SiON and TiN'/HfO2 gate stack triple gate SOI nFinFETs subjected to electrical stress
Publication type
Journal article
Embargo date
9999-12-31
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