Publication:

Single-metal dual-dielectric (SMDD) gate-first CMOS integration towards low VT and high performance

Date

2009
Proceedings Paper
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Author(s)

Ragnarsson, Lars-Ake  
;
Schram, Tom  
;
Rohr, Erika
;
Sebaai, Farid  
;
Kelkar, Prasad
;
Wada, Masayuki
;
Kauerauf, Thomas
;
Aoulaiche, Marc
;
Cho, Moon Ju
;
Kubicek, Stefan  
;
Lauwers, Anne  
;
Hoffmann, Thomas Y.
;
Absil, Philippe  
;
Biesemans, Serge  

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1840 since deposited on 2021-10-18
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