Authors

Ragnarsson, Lars-Ake; Schram, Tom; Rohr, Erika; Sebaai, Farid; Kelkar, Prasad; Wada, Masayuki; Kauerauf, Thomas; Aoulaiche, Marc; Cho, Moon Ju; Kubicek, Stefan; Lauwers, Anne; Hoffmann, Thomas Y.; Absil, Philippe; Biesemans, Serge

Conference

Internationa l Symposium on VLSI Technology, systems and Applications - VLSI-TSA

Title

Single-metal dual-dielectric (SMDD) gate-first CMOS integration towards low VT and high performance

Publication type

Proceedings paper