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Resist fundamentals for resolution, LER and sensitivity (RLS) performance tradeoffs and their relation to micro-bridging defects
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1931 since deposited on 2021-10-18
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Acq. date: 2025-10-25
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Views
1931 since deposited on 2021-10-18
437item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations