Authors

Vanhellemont, Jan; Kissinger, G.; Clauws, P.; Kaniava, Arvydas; Libezny, Milan; Gaubas, Eugenijus; Simoen, Eddy; Richter, H.; Claeys, Cor

Conference

Proceedings of the 6th Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology - GADEST'95

Title

Infrared studies of oxygen precipitation related defects in silicon after various thermal treatments

Publication type

Proceedings paper

Embargo date

9999-12-31